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Large Diameter Quartz Tubing for Furnace and UV Reactor

Large Diameter Quartz Tubing for Furnace and UV Reactor

-- Steady & Reliable Manufacturer --

Introduction

Large Diameter Quartz Tubing refers to fused silica tubes with an Outer Diameter (OD) typically exceeding 100 mm. These tubes are critical components in large-scale industrial processes, serving as furnace linings, UV reactor housings, CVD chambers, and specialized gas delivery conduits. The large size, combined with the material's ultra-high purity, resistance to high temperatures, and chemical inertia, makes them indispensable for processes requiring a pristine, thermally stable enclosure. Yancheng Mingyang Quartz Products Co., Ltd. specializes in drawing and fabricating these large tubes, ensuring tight tolerances on OD, wall thickness, and straightness, which is crucial for uniform process results.

In Thermal Processing, these tubes act as the liner for diffusion and CVD furnaces, protecting the heating elements and insulation from process gases while maintaining an ultra-clean environment for sensitive materials like silicon wafers. The tube’s low thermal expansion coefficient prevents warping or failure during the rapid heating and cooling cycles typical of semiconductor manufacturing. For UV Water Purification Systems, large quartz tubes serve as protective sleeves that house the powerful UV lamps. Here, the tubes must maintain high UV transmission efficiency (specifically at 254 nm) over long periods, despite exposure to water, heat, and high-intensity UV radiation. We offer both Standard (Natural) Quartz for general use and Synthetic Fused Silica for applications requiring the highest purity, DUV transparency, and minimal OH content. We also provide complex fabrication services, including flaring, grinding the ends to precise flatness, and fusing customized flanges or ground joints directly onto the large tubes, preparing them for immediate integration into high-vacuum or high-pressure systems.

By delivering large-scale, high-precision quartz tubing, we enable high-volume, contamination-free processing in critical industries ranging from microelectronics to environmental protection.

Specification Parameters

ParameterDetails
Outer Diameter (OD) Range100 mm up to 600 mm (Custom drawing capability)
Wall ThicknessStandard 3 mm to 10 mm (Customized for pressure/vacuum)
Purity GradeIndustrial (Natural) or Semiconductor Grade (Synthetic, <10 ppb trace metals)
Max Temp UseContinuous operating at 1150∘C; Short term up to 1250∘C
UV TransmissionOptimized for 254 nm transmission (for UV lamps)
Dimensional ToleranceTight control on concentricity and ovality (≤1.5%) for rotary applications
End FinishCut and Fire-Polished, Precision Ground Flat, Flared or Flanged Ends
LengthStandard 1200 mm to 2000 mm (Longer sections available via fusing)

Achieving tight dimensional tolerance is particularly challenging and critical for Large Diameter Quartz Tubing. Any significant ovality or variation in wall thickness can lead to uneven temperature distribution inside a furnace or create sealing issues. Our manufacturing process uses automated tube drawing towers with precise temperature control to minimize these variations, ensuring the specified ID/OD and wall thickness are maintained across the entire length. For UV applications, the tubes must be free of striae (internal stress lines) and bubbles, as these defects can significantly scatter UV light, reducing the efficiency of the disinfection system. We offer advanced processing like flange fusion or grinding the end face to optical flatness, which is necessary for sealing to metal plates in high-vacuum systems. The choice between Natural Quartz (high OH, slight impurity) and Synthetic Quartz (low OH, ultra-pure) depends entirely on the application: UV water treatment uses optimized natural quartz, while CVD requires the highest purity synthetic quartz to avoid wafer contamination. We provide Non-Destructive Testing (NDT) such as polarized light inspection to check for internal stress before shipment.

Applications

  • Semiconductor Furnace Liners: Inner and outer tubes for diffusion, oxidation, and CVD furnaces, protecting the wafers and heating elements.

  • UV Water and Air Treatment: Protective sleeves (jackets) for high-power UV lamps in municipal water treatment plants and large industrial air purifiers.

  • Metallurgical and Materials Processing: Reaction chambers for crystal growth (e.g., GaAs) and high-temperature material synthesis where a clean environment is vital.

  • Specialized Lab Reactors: Large-volume photochemical reactors and high-pressure/high-vacuum experimental chambers.

  • Lighting and Lamp Housings: Outer envelopes for powerful industrial light sources, including high-intensity discharge (HID) lamps.

  • High-Purity Distillation and Condensers: Large coils or straight sections used in high-purity chemical processing where metal contamination is strictly prohibited.

The integrity of the process depends entirely on the quality of the quartz tubing. For furnace applications, using low-quality quartz can lead to devitrification (crystallization) and catastrophic failure, causing costly downtime. Our large tubes are manufactured with superior resistance to devitrification. For UV water treatment, the long-term reliability and UV transmittance of the sleeve directly determine the efficacy of the disinfection system. Our UV sleeves are tested to guarantee minimum transmission degradation over thousands of operational hours. We offer customization for unique process needs, such as forming oval or rectangular cross-sections or adding internal structural supports via complex glassblowing. The ability to supply tubes up to 600 mm OD makes us a premier supplier for the largest industrial UV and thermal processing equipment manufacturers globally.

Advantages

  • Thermal Durability: Low CTE ensures stability against thermal shock, crucial for rapid cooling/heating cycles in furnace operations.

  • High UV Transparency: Optimized material formulation guarantees maximum UV-C light transmission for efficient disinfection.

  • Contamination Control: Ultra-high purity material prevents leaching or outgassing, maintaining a pristine environment for sensitive materials.

  • Superior Dimensional Precision: Tight control over OD/ID and ovality ensures perfect fit, seamless rotation, and uniform process conditions.

  • Custom Fabrication Capability: Advanced glassblowing and CNC grinding allow for complex end seals, flanges, and specialized joints for UHV (Ultra-High Vacuum) sealing.

  • Resistance to Devitrification: Manufactured to resist the formation of crystalline phases, extending operational life at high temperatures.

The core advantage is providing large-scale quartz components that do not compromise on the purity and precision typically associated with smaller parts, enabling reliable, high-volume industrial processing.

Payment and Shipping

We accept standard business payments (T/T, L/C). Pricing for large diameter tubing is primarily based on material volume and the complexity of the end-finish (e.g., grinding vs. fire-polishing).

Shipping Protocol for Large Diameter Quartz Tubing: Focus on securing the ends and preventing lateral stress along the tube length.

  • Custom Wooden Crating: Each tube is housed in a rigid, custom-built wooden crate with internal supports to cradle the tube and prevent rolling or bowing.

  • End Protection: Ends are capped and cushioned with high-density foam to protect ground surfaces and fragile flares or flanges.

  • Cleanliness Certification: Tubes destined for Semiconductor or UHV use are cleaned, capped, and sealed in cleanroom bags, with documentation verifying surface particle count.

Lead times for standard UV sleeves are 3−4 weeks. Custom flared or CNC-ground furnace tubes require 6−8 weeks depending on complexity.

Frequently Asked Questions (FAQ)

  • Q: What is the risk of using large quartz tubes in a rotary furnace?

  • A: The primary risks are bowing (sagging) under high temperature and mechanical stress from rotation if the support is inadequate, or failure if the tube has high ovality. We minimize this risk by specifying the correct wall thickness and ensuring tight control over straightness and concentricity.

  • Q: Does the 254 nm transmission degrade over time in UV water treatment?

  • A: Yes, slight degradation (solarization) is unavoidable, but it is primarily caused by mineral scaling (fouling) on the outer surface from the water. Our quartz material is formulated to minimize internal solarization, and external cleaning procedures are typically used to maintain efficiency.

  • Q: What is the difference between OD and ID tolerance for these large tubes?

  • A: OD tolerance (Outer Diameter) is critical for fitting into outer housing/furnace components. ID tolerance (Inner Diameter) is critical for ensuring uniform gas flow and repeatable deposition results in CVD applications. We specify and control both dimensions to meet precise application needs.

  • Q: How does Doped Quartz apply to large UV reactor tubes?

  • A: Doped quartz is used for the UV lamp itself to block ozone generation. However, the external protective sleeve (the large tube) is typically made of undoped, high-transmission quartz to maximize the 254 nm germicidal light output.

From Made-in-China to
Global Smart Manufacturing

Yancheng Mingyang Quartz Products Co., Ltd. is a company specializing in the production of quartz and special glass products. Yancheng Mingyang Quartz Products Co., Ltd. is the production plant of Jinzhou Mingde Quartz Glass Co., Ltd. in Jiangsu, Since its establishment, the company has developed rapidly, introduced advanced technology and production equipment at home and abroad, and continuously improved and improved product quality. Relying on its own advantages, we have developed a variety of products suitable for the market and meet the needs of different customers, and solved many urgent production problems for our customers.

The company's products include quartz glass tubes, double-hole quartz glass tubes, quartz glass rods, quartz sheets, sapphire windows, calcium fluoride glass windows, infrared ultraviolet coatings, high-pressure resistant aluminosilicate glass window panels, quartz glass instruments, high borosilicate glass instruments, quartz crucibles, quartz gold-plated tubes, quartz heaters, quartz infrared heating tubes, far-infrared directional radiation heaters ultraviolet germicidal lamps and other special types of quartz glass products.

Yancheng Mingyang Quartz Products Co., Ltd.
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