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Quartz Plates and Discs for Optical and Thermal Applications

Quartz Plates and Discs for Optical and Thermal Applications

-- Steady & Reliable Manufacturer --

Introduction

Quartz Plates and Discs are flat, planar components manufactured from fused silica and widely used as substrates, windows, protective covers, and furnace elements across scientific and industrial sectors. The exceptional combination of high optical transmission (especially in UV), high thermal stability, and mechanical flatness makes them superior to standard glass. Yancheng Mingyang Quartz Products Co., Ltd. supplies these products in various grades and dimensions, from thin optical windows requiring nanometer-level flatness to thick, large-area plates used as furnace bottoms or protective barriers.

For Optical Applications, such as beam splitters, filters, or protective windows in spectrometers and laser systems, we use JGS1 Synthetic Fused Silica. This material provides maximum transparency down to 170 nm (DUV), crucial for demanding photonics. We employ advanced polishing techniques, including double-sided polishing and magneto-rheological finishing (MRF), to achieve extremely high levels of parallelism and surface flatness (often ≤λ/10), which prevents wavefront distortion and maintains beam quality. For Thermal and Mechanical Applications (e.g., furnace hearth plates, support bases for high-temperature materials), we use high-quality natural fused quartz. Here, the focus is on maximizing mechanical strength and resistance to thermal shock. These plates are typically precision ground rather than polished, offering a balance between cost and dimensional accuracy. We also offer Translucent (Opaque) Quartz Plates which are used to diffuse radiant heat uniformly, such as in rapid thermal processing (RTP) systems, where even heating is critical for wafer processing. Custom fabrication services include CNC machining of mounting holes, edge bevelling, and applying specialized coatings (e.g., AR coatings for laser windows or conductive coatings for heating elements).

By providing meticulously finished quartz plates and discs, we ensure stability, high transmission, and contamination control for the most precise optical, thermal, and chemical processes.

Specification Parameters

ParameterDetails
Material GradeStandard, UV-Grade (Natural), or DUV-Grade (Synthetic JGS1)
Thickness Range0.5 mm (Thin Substrates) to 50 mm (Thick Load-Bearing Plates)
Size/ShapeCircular Discs (up to 500 mm OD), Square, Rectangular, Custom Shapes
Surface FlatnessIndustrial: ≤1 wave; Optical Grade: ≤λ/10 (for laser applications)
Surface QualityCommercial: ≤80/50 S/D; Laser Grade: ≤20/10 S/D
Coating OptionsAnti-Reflective (AR), ITO (Indium Tin Oxide), HR (High Reflective)
Thermal PropertyWithstands continuous 1150∘C operation with near-zero thermal expansion

The most crucial technical parameters are Surface Flatness and Purity Grade. For Optical Plates, the flatness directly dictates the quality of the transmitted or reflected wavefront. Achieving λ/10 flatness requires expert CNC control and precise polishing to minimize the peak-to-valley error across the plate surface. For UV and DUV applications, the use of Synthetic Fused Silica (JGS1) is mandatory due to its minimal absorption and high resistance to UV-induced darkening (solarization). For Furnace Plates and large discs, Thermal Uniformity is the main concern. Our plates are annealed after initial shaping to remove internal stress, minimizing the risk of warping or cracking when exposed to steep temperature gradients. Translucent Quartz Plates are specifically engineered to contain micro-bubbles within the structure; these bubbles serve to scatter radiant heat, creating a highly uniform and diffuse heat source for process heating. We use state-of-the-art metrology, including interferometers and coordinate measuring machines (CMM), to confirm all dimensional and flatness specifications prior to release.

Applications

  • Semiconductor Manufacturing: Substrates for PVD/CVD processes, wafer carriers, and inspection windows within process chambers.

  • High-Power Laser Systems: Output windows, beam splitters, and protective debris shields, particularly for UV and IR industrial lasers.

  • Laboratory and Analytical Instruments: Optical windows for high-pressure/high-temperature cells, filter substrates, and spectrometer entrance windows.

  • Thermal Processing: Furnace hearth plates, setter plates for ceramic firing, and bottom plates for rapid thermal processing (RTP) systems.

  • UV Exposure and Curing: Transparent covers for UV curing stations, ensuring maximum UV light penetration while protecting the lamp and reflective surfaces.

  • General Sight Glass: Chemically resistant and thermally stable protective covers for industrial tanks, reactors, and high-vacuum chambers.

The versatility of quartz plates stems from the fact that they excel where mechanical stability, chemical purity, and optical clarity must all be present. For Optical Plates, the superior hardness of fused silica ensures a durable surface that resists scratching better than soft crystals. For Furnace Plates, the quartz material prevents metallic contamination of the processed materials, unlike metallic or some ceramic setters. Our fabrication capability allows us to produce plates with complex features, such as integrated channels for cooling or vacuum grooves for clamping. The availability of Opaque Quartz Plates provides an additional thermal engineering solution, allowing customers to replace traditional SiC or graphite elements with a cleaner, more thermally shock-resistant alternative in diffusion furnaces. We support both high-volume OEM needs for standard sizes and one-off custom fabrication for advanced research applications.

Advantages

  • Exceptional UV Transmission: JGS1 synthetic plates offer DUV transparency down to 170 nm for sensitive photonics and sensing.

  • High Thermal Shock Resistance: Low CTE allows plates to withstand rapid temperature changes without cracking or warping, ensuring long service life.

  • Precision Flatness and Parallelism: Achievable ≤λ/10 tolerances guarantee minimal beam distortion for high-end optical systems.

  • Contamination-Free Support: High purity material prevents the outgassing or leaching of impurities, vital for semiconductor and high-vacuum processes.

  • Opaque Quartz Option: Provides uniform radiant heating/diffusion for critical thermal processes like RTP and annealing.

  • Robust Mechanical Stability: Suitable for load-bearing applications at high temperatures where the plate must maintain its dimension and form.

Our core advantage is providing planar components where the combination of optical quality, thermal stability, and customizability is unmatched, ensuring reliability across critical process interfaces.

Payment and Shipping

We accept standard business payments (T/T, L/C). Pricing varies significantly based on material grade (natural vs. synthetic) and surface finish (ground vs. optical polish). Optical plates require upfront polishing fees.

Shipping Protocol for Quartz Plates and Discs: Specialized protection for polished surfaces and edges.

  • Individual Cradling: Each polished optical plate is cleaned, inspected, and placed in a dedicated plastic tray or secured in a foam insert to prevent surface contact.

  • Edge Protection: Thicker thermal plates are separated by non-abrasive material to protect the precision-ground edges from chipping.

  • Cleanroom Preparation: Optical-grade plates are sealed in Class100 bags, and all shipments include QC reports confirming dimensional and flatness tolerances.

Lead times for standard, ground thermal plates are 2−3 weeks. Custom optical plates with λ/10 polish and AR coatings require 6−10 weeks.

Frequently Asked Questions (FAQ)

  • Q: What is the difference between JGS1 and JGS2 quartz for plates?

  • A: JGS1 (Synthetic Fused Silica) has the highest purity and lowest OH content, making it mandatory for deep UV and high-power laser applications. JGS2 (Natural Fused Quartz) is excellent for visible light and near-UV applications (above 220 nm), offering a lower cost alternative for general use.

  • Q: Can quartz plates be chemically tempered or hardened like standard glass?

  • A: No. Fused silica has a network structure that prevents effective chemical or thermal tempering. Its strength comes from its inherent purity and low CTE (∼0.55×10−6/K), which limits the internal stress caused by temperature changes. Mechanical strength is primarily improved by meticulous surface polishing and edge finishing.

  • Q: Why use opaque quartz plates for RTP instead of transparent plates?

  • A: Opaque quartz is used because the internal micro-bubbles scatter the intense light from the heating lamps, diffusing the heat into a highly uniform, low-gradient source. This results in much better temperature uniformity across the large area of the silicon wafer being processed, preventing localized overheating.

  • Q: How can I clean surface contamination from an optical quartz plate?

  • A: For fingerprints and light dust, use an optical grade solvent (like IPA or Acetone) and a lens tissue using the drag-wipe method. For chemical stains, specialized acid cleaning (e.g., concentrated HNO3​ or H2​SO4​) can be used, avoiding HF at all costs.

From Made-in-China to
Global Smart Manufacturing

Yancheng Mingyang Quartz Products Co., Ltd. is a company specializing in the production of quartz and special glass products. Yancheng Mingyang Quartz Products Co., Ltd. is the production plant of Jinzhou Mingde Quartz Glass Co., Ltd. in Jiangsu, Since its establishment, the company has developed rapidly, introduced advanced technology and production equipment at home and abroad, and continuously improved and improved product quality. Relying on its own advantages, we have developed a variety of products suitable for the market and meet the needs of different customers, and solved many urgent production problems for our customers.

The company's products include quartz glass tubes, double-hole quartz glass tubes, quartz glass rods, quartz sheets, sapphire windows, calcium fluoride glass windows, infrared ultraviolet coatings, high-pressure resistant aluminosilicate glass window panels, quartz glass instruments, high borosilicate glass instruments, quartz crucibles, quartz gold-plated tubes, quartz heaters, quartz infrared heating tubes, far-infrared directional radiation heaters ultraviolet germicidal lamps and other special types of quartz glass products.

Yancheng Mingyang Quartz Products Co., Ltd.
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