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Flanged Quartz Tubes

Flanged Quartz Tubes

-- Steady & Reliable Manufacturer --

Introduction

Flanged Quartz Tubes, meticulously fabricated by Yancheng Mingyang Quartz Products Co., Ltd., are high-integrity components essential for creating reliable, vacuum-tight, and chemically resistant interfaces in process equipment. We achieve this by permanently fusing precision-ground quartz flanges onto the ends of high-purity quartz tubing. This custom assembly eliminates the need for complex internal gaskets and external metal connectors in the critical process zone, ensuring that only pure quartz contacts the process media. These assemblies are indispensable in high-temperature furnace systems, chemical reactors, vacuum apparatus, and diffusion/oxidation processes within the semiconductor industry, where purity and seal integrity are paramount. The inherent characteristics of fused quartz—near-zero thermal expansion and exceptional chemical inertness—make the flanged tube a robust and long-lasting solution, resisting degradation from aggressive gases and thermal cycling that would quickly destroy standard glass-to-metal seals.

Our glassblowing and welding specialists utilize state-of-the-art fusion welding techniques to ensure the flange-to-tube transition is stress-free, uniform, and completely leak-proof, often exceeding the vacuum performance of traditional sealed joints. We offer a wide variety of standard flange interfaces, including ISO-KF, Conflat (CF), NW, and proprietary OEM specifications, allowing our tubes to integrate seamlessly into existing vacuum systems and process chambers worldwide. Furthermore, we can fabricate complex multi-flanged assemblies, including side ports, temperature sensor wells, and gas inlets/outlets, all fused into a single monolithic unit. This eliminates potential leakage points and enhances the overall safety and purity of the client's operation. As a manufacturer controlling both the quartz tubing production and the subsequent specialized fabrication, we guarantee the highest quality from raw material to final assembly. For demanding vacuum applications, we perform helium leak detection testing to certify the vacuum integrity of every weld, providing verifiable proof of quality to our high-tech clients.

The flanged quartz tube is a true component-level solution, reducing assembly time and improving process reliability. We consult closely with process engineers to determine the optimal flange type, tube dimension, and tolerance necessary for flawless integration into high-value manufacturing lines, making us a key supplier for specialized industrial reactor components.

Specification Parameters

ParameterDetails
Material PuritySemiconductor or High Purity Fused Quartz (SiO2​≥99.995%)
Tube Outer Diameter (OD)10 mm to 300 mm (For various furnace types)
Flange Types AvailableConflat (CF), ISO-KF, NW (Custom/Proprietary Flanges)
Vacuum IntegrityCertified Leak Rate ≤1×10−9 mbar⋅L/s (Helium Leak Tested)
Dimensional Tolerance (Flange Face)Precision Ground Flatness ≤10 μm across sealing faceMax Operating Temperature1150∘C (Continuous); limited by mating gasket/flange material
Flange Attachment MethodStress-Minimized Quartz Fusion Welding/Glassblowing
Surface Finish (Weld Zone)Fire Polished or Acid Cleaned for minimum particle generation

The specifications for flanged quartz tubes reflect the precision required for sealing in high-purity and high-vacuum applications. The vacuum integrity specification (Leak Rate ≤1×10−9 mbar⋅L/s) is a direct measurement of the quality of the quartz fusion weld, ensuring the tube is suitable for ultra-high vacuum (UHV) systems. This is achieved by meticulously controlling the heat profile during welding to minimize internal stress concentration near the joint. The dimensional tolerance on the flange face flatness (≤10 μm) is crucial for forming a perfect seal with the mating metal flange, whether using a knife-edge copper gasket (CF) or an O-ring (KF/NW). We use advanced optical comparators and laser measurement systems to certify these tolerances. The material grade is typically our highest purity SiO2​ to prevent contamination of gases passing through the tube. Furthermore, we can integrate UV-transmitting or IR-reflective coatings directly onto the inner surface of the tube, adding functional benefits without compromising the seal integrity. We specialize in producing flanged tubes for specific furnace zones that require rapid temperature changes, where the low CTE of quartz guarantees that the assembly will not fail due to thermal stress.

Applications

  • Semiconductor Thermal Processing: Used as high-purity process tubes in horizontal and vertical diffusion, oxidation, and annealing furnaces, allowing easy connection to gas handling systems.

  • Chemical and Petrochemical Research: Serving as high-temperature, high-purity reactor vessels and sight-glass interfaces for studying corrosive chemical reactions under vacuum or high pressure.

  • High Vacuum Systems and UHV Chambers: Acting as viewing ports, electrical feedthroughs, or sample transfer chambers where maintaining ultra-low base pressures is necessary.

  • Plasma and Deposition Systems: Integrated into CVD or PVD reactors as gas mixing or pre-reaction zones, benefiting from quartz's resistance to plasma etching and high-energy particles.

  • Material Synthesis under Controlled Atmosphere: Used for synthesizing advanced materials (e.g., superconductors, nanomaterials) in sealed, pure environments that require precise gas control and temperature profiles.

  • Analytical Instrumentation: Forming the flow cell or reaction chamber in high-end mass spectrometers or gas chromatographs where sample purity is paramount.

The application benefit is centered on eliminating material incompatibility problems. Since the tube itself, including the welded flange area, is pure quartz, there is no outgassing or corrosion risk from metal components entering the process stream, which is a major concern in ultra-pure gas handling. Furthermore, the fused flange offers better mechanical stability and alignment compared to detachable joint assemblies, which can shift or leak under high thermal loads. We are experienced in customizing the internal geometry of the tube adjacent to the flange, such as adding tapered sections or internal baffles, to optimize gas flow for the client's specific process requirement. The ease of installation and replacement afforded by using standard flange interfaces (CF, KF, NW) simplifies system maintenance and reduces the total cost of ownership over the component's extended service life.

Advantages

  • Guaranteed Vacuum Integrity: Certified leak rates suitable for UHV applications, ensuring reliable performance in the most demanding vacuum and pressure environments, minimizing process contamination from air or leaks.

  • Elimination of Process Contamination: The fusion weld ensures 100% quartz contact with process gases/fluids, preventing metal ion leaching, outgassing, and reaction that occurs with standard metal flanges.

  • High Thermal and Chemical Durability: Withstands temperatures up to 1150∘C and resists attack from virtually all strong acids and corrosive gases, guaranteeing a long service life in harsh chemical processes.

  • Seamless Integration with Standard Systems: Flanges are precision-ground to mate perfectly with internationally recognized standards (CF, KF, NW), simplifying system design and maintenance protocols globally.

  • Complex Custom Fabrication: We can integrate multiple flanges, side arms, domes, and internal supports into a single monolithic unit, reducing complexity and potential leak paths in the overall reactor assembly.

  • Stress-Minimized Welding: Proprietary glassblowing techniques ensure the flange-to-tube interface is free from detrimental residual stress, providing mechanical longevity even under severe thermal cycling.

The financial benefit of using our Flanged Quartz Tubes is realized through higher production yields and reduced long-term maintenance costs. The reliability of a fused quartz seal far exceeds that of elastomer- or metal-gasketed joints in high-temperature or corrosive media. Furthermore, our ability to provide certified leak detection results offers unprecedented confidence in system performance for critical operations like compound semiconductor growth. Our competitive edge lies in the combination of our material expertise (high-purity quartz tubing) and our specialized fabrication skills (precision fusion welding and grinding).

Payment and Shipping

We accept payments via T/T (Telegraphic Transfer), L/C (Letter of Credit) for high-value orders, and other secure digital banking platforms. Due to the high-value and custom nature of Flanged Quartz Tubes, a 30-50% down payment is typically required to initiate production, with the remainder payable upon completion and prior to final shipment.

Shipping and Logistics for Vacuum Components: We employ rigorous packaging to ensure the flanges maintain their critical flatness and finish.

  • Flange Protection: The precision-ground sealing surfaces of the flanges are protected with non-abrasive covers and secured with plastic caps to prevent surface damage or contamination during handling.

  • Custom Suspension Packaging: The entire assembly is suspended within high-resilience foam or purpose-built crates to protect the delicate flange-to-tube transition from shear forces and shock.

  • Freight Options: We recommend express air freight for all vacuum components to minimize transit time and environmental exposure. We manage all required international shipping documentation, including ITAR compliance paperwork if applicable, to ensure efficient customs clearance worldwide.

Lead times for custom flanged assemblies are typically 20−35 working days, dependent on the complexity of the integrated features and the type of flange requested. We offer clear production milestone tracking.

Frequently Asked Questions (FAQ)

  • Q: Are Flanged Quartz Tubes compatible with standard metal CF flanges?

  • A: Yes, our quartz CF flanges are precision-ground to match the geometry and flatness requirements of standard metal CF flanges, allowing them to be joined using the standard copper gasket and bolt system, creating a highly robust, bakeable vacuum seal.

  • Q: What is the maximum temperature rating of the quartz flange assembly?

  • A: The quartz itself can withstand up to 1150∘C continuously. However, the maximum operating temperature of the assembly is often limited by the sealing material used; for example, CF flanges with copper gaskets can be baked out up to 450∘C, while KF flanges with Viton O-rings are limited to about 150∘C.

  • Q: Can you perform vacuum leak testing on the finished assembly before shipping?

  • A: Yes, we provide mandatory helium leak detection testing for all flanged components intended for vacuum service. We certify the leak rate of the weld zones and the overall assembly, ensuring compliance with the stringent 1×10−9 mbar⋅L/s specification or the client’s required standard.

  • Q: What is the concentricity tolerance between the tube ID and the flange face center?

  • A: We maintain a tight tolerance on concentricity, typically <0.1 mm for standard sizes, which is crucial for ensuring proper alignment when mating the tube into a reactor chamber or flow path. Precision requirements can be tightened further upon consultation.

From Made-in-China to
Global Smart Manufacturing

Yancheng Mingyang Quartz Products Co., Ltd. is a company specializing in the production of quartz and special glass products. Yancheng Mingyang Quartz Products Co., Ltd. is the production plant of Jinzhou Mingde Quartz Glass Co., Ltd. in Jiangsu, Since its establishment, the company has developed rapidly, introduced advanced technology and production equipment at home and abroad, and continuously improved and improved product quality. Relying on its own advantages, we have developed a variety of products suitable for the market and meet the needs of different customers, and solved many urgent production problems for our customers.

The company's products include quartz glass tubes, double-hole quartz glass tubes, quartz glass rods, quartz sheets, sapphire windows, calcium fluoride glass windows, infrared ultraviolet coatings, high-pressure resistant aluminosilicate glass window panels, quartz glass instruments, high borosilicate glass instruments, quartz crucibles, quartz gold-plated tubes, quartz heaters, quartz infrared heating tubes, far-infrared directional radiation heaters ultraviolet germicidal lamps and other special types of quartz glass products.

Yancheng Mingyang Quartz Products Co., Ltd.
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