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Quartz Flat Plates & Discs

Quartz Flat Plates & Discs

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Introduction

Quartz Flat Plates and Discs are essential components in optics, semiconductor, and high-temperature furnace applications, serving as windows, substrates, baffles, or protective shields. These components are fabricated from high-purity fused silica, offering the superior characteristics of low thermal expansion, excellent chemical inertness, and exceptional UV and visible light transmission. Yancheng Mingyang Quartz Products Co., Ltd. specializes in cutting, grinding, and polishing quartz raw material into plates and discs with highly precise flatness, parallelism, and dimensional tolerances. The flatness of the plate is often critical in optical systems to prevent wavefront distortion and in mechanical systems to ensure a perfect seal. We manufacture plates and discs up to very large dimensions (e.g., 600 mm diameter) using advanced CNC cutting and lapping equipment, guaranteeing uniformity across the entire surface area.

We offer multiple grades, including standard UV grade fused quartz for general high-temperature applications and high-end Synthetic Fused Silica for critical optical applications where the lowest possible OH content and highest DUV transmission are required. The thickness uniformity is meticulously controlled, often within ±0.01 mm, which is vital for substrates used in thin-film deposition or as reference planes in metrology. We provide custom machining services for features such as chamfered edges, precision drilled holes, beveled corners, and custom etchings for alignment markers or identification. Plates and discs are indispensable in plasma etching chambers as protective shields against corrosive gases and in astronomical telescopes as corrective optical windows. Our quality control procedures include interferometric testing for flatness and parallelism, ensuring every piece meets the most stringent industrial and scientific standards.

By controlling the entire process from quartz melting to final polishing, we guarantee both the material purity and the final geometric accuracy. This makes us a reliable, single-source supplier for high-value quartz components demanded by the global semiconductor, aerospace, and advanced optics industries.

Specification Parameters

ParameterDetails
Material GradeStandard Fused Quartz, JGS1 (Synthetic UV Grade), Opaque Fused Silica
Dimensional Range (L×W or Dia)10 mm×10 mm up to 600 mm diameter
Thickness TolerancePrecision ±0.01 mm (Required for high-end optical substrates)
Surface Flatness (Optical Grade)Typically λ/4 per inch; Ultra-precision λ/10 across the aperture
ParallelismAs low as <5 arc seconds (for interferometer plates)
Scratch-Dig RatioStandard 60/40; Optical 20/10 (per MIL-PRF-13830B)
Max Continuous Temp1100∘C
CustomizationHoles, Notches, Bevels, AR/HR Coatings, Hydrophobic Treatments

The critical technical specifications for Quartz Flat Plates & Discs are the Surface Flatness and Parallelism. For plates used as optical windows in high-power laser systems or high-resolution imaging, a flatness of λ/10 is necessary to minimize wavefront distortion and scattered light. We verify this using high-resolution Fizeau interferometers. The tight Thickness Tolerance (±0.01 mm) and Parallelism (<5 arc seconds) are essential when the plate acts as a beam splitter, filter, or reference optic, ensuring no optical path difference is introduced. We employ CNC grinders with diamond tools for the initial shaping, followed by chemical-mechanical polishing (CMP) for the final, ultra-smooth finish (Ra<0.5 nm). The selection of JGS1 Synthetic Fused Silica is mandatory for deep-ultraviolet applications (below 200 nm) due to its near-perfect purity and resistance to solarization. For extreme high-temperature applications (furnace baffles), we offer plates made from opaque quartz, which helps diffuse radiant heat. Customization includes the application of specialized AR (Anti-Reflective) coatings optimized for single or broadband wavelengths to maximize transmission and prevent ghosting reflections, adding significant functional value.

Applications

  • Semiconductor Processing: Used as high-purity substrates, showerheads, RF windows, and shielding plates in CVD, PVD, and plasma etching chambers, resisting highly corrosive process gases.

  • Optical Windows and Beam Splitters: Serving as highly transmissive optical elements in DUV lithography, high-power laser systems, and astronomical instrumentation, leveraging superior clarity and low distortion.

  • High-Temperature Furnace Baffles: Used as thermal barriers or load plates in diffusion and annealing furnaces, benefiting from the low CTE and ability to withstand thermal shock.

  • Analytical Instrumentation: Forming the windows of high-pressure liquid cells, environmental chambers, and plasma viewing ports in high-end spectrometers and mass analysis equipment.

  • Photomask Substrates: High-quality, ultra-flat plates are used as the base material for generating high-resolution photomasks in microchip fabrication.

  • Thin-Film Deposition Substrates: Serving as chemically and thermally stable substrates for the deposition of high-purity thin films in research and manufacturing.

In demanding applications like plasma etching, the plate not only serves as a window but also as a protective layer that must resist erosion from aggressive chemical species (e.g., fluorine radicals). Our quartz plates are engineered to offer the maximum lifetime in these corrosive environments. The low thermal expansion is an absolute requirement when a plate is used in high-temperature cyclic operation, preventing thermal stress-induced cracking that metal or standard glass would exhibit. Our capability to produce extremely large-diameter discs with tight tolerance is critical for manufacturing next-generation displays and solar panels where large-area deposition is performed. We can also integrate fine features, such as laser-etched fiducial marks or alignment grooves, directly onto the quartz surface for use in automated handling and inspection systems, simplifying the client's assembly and calibration process. The exceptional mechanical strength of polished quartz makes it a robust choice for pressure-differential windows in vacuum systems.

Advantages

  • Unmatched Optical Purity and Transmission: Especially in the DUV range (∼185 nm), vital for spectroscopy, UV curing, and lithography applications.

  • Extreme Dimensional Precision: Guaranteed flatness (λ/10) and tight thickness tolerance (±0.01 mm), essential for high-resolution optics and metrology.

  • High Thermal and Chemical Stability: The plates resist thermal shock and attack from strong acids, bases, and plasma environments, ensuring component longevity.

  • Large-Area Fabrication Capability: Ability to produce plates and discs up to 600 mm diameter while maintaining strict tolerances, supporting large-scale industrial equipment.

  • Low Coefficient of Thermal Expansion (CTE): Provides structural stability in systems experiencing rapid or extreme temperature fluctuations (furnaces, laser cavities).

  • Custom Machining and Coating: Full capability for drilling, notching, shaping, and applying performance-enhancing optical coatings for specialized applications.

The overall competitive advantage is the seamless fusion of superior material properties with ultra-precision fabrication techniques. Our quality control, particularly the interferometric checks on flatness, gives our clients confidence in the performance of these critical components. Unlike suppliers focused only on standard dimensions, our core competency is custom, high-tolerance manufacturing. This allows us to deliver unique plate and disc geometries tailored exactly to complex equipment requirements, often reducing overall system complexity and assembly time for the client. The durability of our quartz plates results in longer operational cycles and reduced maintenance costs in harsh industrial environments.

Payment and Shipping

We accept standard international payments including T/T and L/C for large-volume orders. Given the high-value nature of precision optical and semiconductor-grade quartz, favorable credit terms can be arranged for established, long-term partners.

Shipping Protocol for Flat Plates: Extreme care is taken to protect the polished surfaces and edges.

  • Individual Optical Grade Packaging: Each plate or disc is handled and packaged in an ISO Class 5 environment, typically separated by lens paper or film, and sealed in non-abrasive, anti-static plastic boxes.

  • Secure Casing: Multiple boxes are secured within a sturdy, cushioned outer container to prevent shifting and surface contact during transit. Larger plates are custom-crated with edge support.

  • Freight: We use reliable international express air freight for global delivery, ensuring minimal transit time and handling. All necessary quality and customs documentation are provided.

Lead times vary by tolerance; standard-grade plates are 10−15 working days; λ/10 polished or custom-coated plates require 4−6 weeks. Safe and verified delivery is guaranteed.

Frequently Asked Questions (FAQ)

  • Q: What is the maximum operating temperature for your quartz plates used in furnaces?

  • A: Our high-purity fused quartz plates are rated for continuous use up to 1100∘C. They can withstand intermittent temperatures up to 1250∘C but should be properly supported to prevent sagging over long periods at these peak temperatures.

  • Q: What is the difference between λ/4 and λ/10 flatness?

  • A: Flatness is measured in wavelengths of light (λ≈633 nm). λ/4 means the deviation from perfect flatness is less than one-quarter of a wavelength, which is standard. λ/10 is significantly flatter (less than one-tenth of a wavelength) and is required for high-precision optical components where minimal wavefront error is critical.

  • Q: Do you offer plates with etched features or alignment marks?

  • A: Yes, we provide precision laser or chemical etching services for alignment marks, fiducial crosses, identification numbers, and other permanent features directly onto the quartz surface without compromising its chemical integrity.

  • Q: Can these plates be used as windows in deep-UV (DUV) sterilization equipment?

  • A: Yes, particularly plates made from our Synthetic Fused Silica (JGS1 grade), which offers excellent transmission down to 185 nm and is highly resistant to solarization (damage from prolonged UV exposure).

From Made-in-China to
Global Smart Manufacturing

Yancheng Mingyang Quartz Products Co., Ltd. is a company specializing in the production of quartz and special glass products. Yancheng Mingyang Quartz Products Co., Ltd. is the production plant of Jinzhou Mingde Quartz Glass Co., Ltd. in Jiangsu, Since its establishment, the company has developed rapidly, introduced advanced technology and production equipment at home and abroad, and continuously improved and improved product quality. Relying on its own advantages, we have developed a variety of products suitable for the market and meet the needs of different customers, and solved many urgent production problems for our customers.

The company's products include quartz glass tubes, double-hole quartz glass tubes, quartz glass rods, quartz sheets, sapphire windows, calcium fluoride glass windows, infrared ultraviolet coatings, high-pressure resistant aluminosilicate glass window panels, quartz glass instruments, high borosilicate glass instruments, quartz crucibles, quartz gold-plated tubes, quartz heaters, quartz infrared heating tubes, far-infrared directional radiation heaters ultraviolet germicidal lamps and other special types of quartz glass products.

Yancheng Mingyang Quartz Products Co., Ltd.
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