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Quartz Substrates and Plates

Quartz Substrates and Plates

-- Steady & Reliable Manufacturer --

Introduction

Quartz Substrates and Plates are flat, precision-polished components made from fused silica, prized for their exceptional thermal, chemical, and optical properties. These components serve as fundamental base materials in the semiconductor, optical, and electronics industries where dimensional stability, ultra-high purity, and transparency across the UV-Vis-IR spectrum are non-negotiable requirements. Yancheng Mingyang Quartz Products Co., Ltd. manufactures these substrates from both high-purity natural fused quartz and JGS1 grade Synthetic Fused Silica, depending on the client's tolerance for trace elements and the required DUV (Deep Ultraviolet) transmission. Our fabrication process includes CNC machining, precise grinding, and single-sided or double-sided polishing to achieve superior flatness, parallelism, and surface quality (measured in Scratch/Dig).

In the semiconductor industry, quartz plates are used as high-stability carriers or chucks in etching and deposition equipment due to their minimal thermal expansion. The extremely low coefficient of thermal expansion (CTE) means the plate maintains its critical dimensions even when subjected to rapid and extreme temperature fluctuations (up to 1100∘C), which prevents warping and maintains alignment accuracy during complex lithography steps. For optical applications, the substrate's high transmission, particularly in the DUV region (180 nm to 250 nm), makes it indispensable for mask blanks, optical windows, and filter substrates. We offer custom fabrication including precision drilling, slotting, and edge beveling to meet the exact mechanical interface required by the client’s process chamber or optical system. Every substrate is rigorously inspected using interferometry to verify flatness and parallelism and certified using ICP-MS to confirm ppb-level metallic purity for the most sensitive applications.

By providing substrates and plates of verified purity and precision, we enable the next generation of high-resolution optics, stable electronic packaging, and critical semiconductor processing equipment worldwide.

Specification Parameters

ParameterDetails
Material GradeNatural Fused Quartz or JGS1 Synthetic Fused Silica
Thickness Range0.5 mm to 50 mm (Thin for optics, thick for mechanical stability)
Size/DimensionUp to 600 mm×600 mm (Custom large formats available)
Surface FlatnessHigh Precision: ≤λ/10 to λ/20 (Depending on application)
ParallelismControlled to 1 arc second to 30 arc seconds
Surface QualityScratch/Dig ≤60/40 (Industrial) to ≤10/5 (Optical)
UV TransmissionExcellent down to 180 nm (for Synthetic Fused Silica)
Thermal PropertyNear-zero CTE (∼0.5×10−6/K)

The critical technical specifications for Quartz Substrates and Plates are the Surface Flatness and the UV Transmission characteristics. Flatness is measured in wavelengths (λ) and must be maintained at λ/10 or better for lithography mask blanks and high-end optical mirrors, where any deviation would introduce wavefront errors. We use large-format, laser-guided polishing machines and interferometers to achieve and verify this level of flatness. For DUV applications (e.g., 193 nm lithography), Synthetic Fused Silica (JGS1) is mandatory because its structure is virtually free of water and metallic impurities, offering over 90% transmission down to 180 nm where natural quartz becomes opaque. The Near-Zero CTE is leveraged in high-power laser optics to prevent thermal lensing and beam distortion under intense heat load. For plasma etching chambers, the high purity and chemical inertness of the quartz plate resist attack from corrosive process gases, extending the maintenance cycle. We offer specialized surface coatings, such as AR (Anti-Reflective) or HR (High-Reflective) coatings, to optimize the optical performance for specific laser or imaging wavelengths, further customizing the material for the client's system.

Applications

  • Semiconductor Photomask Blanks: Used as the base material for the glass photomasks that define the patterns on silicon wafers during the lithography process.

  • Etch/Deposition Chamber Components: Serving as susceptors, carrier plates, and viewing windows in plasma etching and chemical vapor deposition (CVD) equipment due to stability and chemical resistance.

  • High-Power Laser Optics: Employed as precision windows, mirrors, and prisms for DUV and IR laser systems that require high transparency and resistance to thermal shock.

  • Electronic Display Fabrication: Used as precise, dimensionally stable substrates in the manufacturing of OLED and advanced flat panel displays.

  • Reference Standards and Calibration Plates: High-flatness quartz plates are used as calibration standards for metrology and inspection equipment.

  • UV Reactor Windows: Serving as transparent covers or dividers in UV germicidal reactors that require high UV-C transmission.

The use of quartz substrates directly impacts the quality and yield of final products. In lithography, the dimensional stability of the mask blank is what allows for the printing of sub-micron features with high fidelity. In plasma processing, the purity of the quartz plate ensures that the process chamber is not contaminated by metallic impurities leaching from the carrier material, which is a major yield killer in silicon wafer fabrication. Our capability to produce large-format, high-flatness plates up to 600 mm×600 mm supports the latest generation of large-scale lithography and display manufacturing equipment. We provide specialized mechanical features such as grooves, through-holes, and polished beveled edges necessary for precise mounting and handling within automated semiconductor equipment. By maintaining ppb purity, we ensure our substrates are compatible with the most sensitive cleanroom and vacuum environments.

Advantages

  • Exceptional Dimensional Stability: Near-zero CTE prevents warping and maintains critical dimensions under extreme thermal cycling (e.g., semiconductor processing).

  • Highest Purity for Electronics: Synthetic JGS1 grade offers ppb-level purity, eliminating mobile ion contamination for sensitive IC fabrication.

  • Superior Optical Transmission: Excellent transparency from DUV (180 nm) through the IR band, enabling a wide range of optical and laser applications.

  • High Precision Flatness and Parallelism: Achieved through advanced polishing and inspection, vital for low-aberration optics and high-resolution lithography masks.

  • Chemical and Plasma Resistance: Inert to most corrosive process gases, extending the life and maintenance intervals of chamber components.

  • Custom Machining Capability: Ability to CNC mill and drill complex features while maintaining high surface quality and dimensional tolerances.

The core advantage is the precision combination of thermal, chemical, and optical performance. Unlike other materials, quartz provides all three at an extreme level. Our cleanroom manufacturing, combined with comprehensive QC (interferometry, ICP-MS), ensures that every plate meets the non-visible specifications required for high-tech manufacturing. We provide technical consultation to help clients choose between natural and synthetic quartz based on their specific wavelength and purity requirements, optimizing both performance and cost.

Payment and Shipping

We accept standard payments (T/T, L/C). Due to the high value and precision nature of these products, a deposit is typically required, and we offer consignment and long-term contracts for major $\text{OEM}$s in the semiconductor and display industries.

Shipping Protocol for Substrates: Must ensure protection from scratches, impacts, and contamination.

  • Cleanroom Packaging: Substrates are cleaned to Class100 standards, sealed in UV-protected, anti-static plastic carriers or cassettes.

  • Floating Packaging: Multiple pieces are secured in specialized, cushioned boxes designed to prevent contact between substrates and absorb shock during transport.

  • Freight: Primarily dispatched via high-security, climate-controlled air freight. Each shipment includes full CoA (Certificate of Analysis) and dimensional reports.

Lead times for standard sizes are 15−20 working days. Custom flatness, DUV grade synthetic material, or complex CNC features can extend lead times to 6−8 weeks.

Frequently Asked Questions (FAQ)

  • Q: What is the main difference between natural fused quartz and synthetic fused silica for plates?

  • A: Natural Fused Quartz is cheaper and has good UV transmission down to ∼220 nm. Synthetic Fused Silica (JGS1) is purer, has a lower OH content, and transmits excellently down to 180 nm. Synthetic is required for all DUV optics and the highest-purity semiconductor work.

  • Q: How is surface flatness measured and what does λ/10 mean?

  • A: Flatness is measured using a laser interferometer. λ/10 means that the maximum deviation from a perfectly flat surface across the plate is no more than one-tenth of the wavelength of the light used for measurement (typically ∼633 nm). This indicates exceptional surface quality.

  • Q: Why is quartz often chosen over sapphire for high-temperature/high-purity plates?

  • A: While sapphire is harder and has a higher max temperature, quartz is significantly cheaper, available in much larger sizes, and has a lower CTE (sapphire is anisotropic). For most applications, quartz provides a superior balance of size, cost, and thermal stability.

  • Q: Can I get an AR coating applied to the quartz plate?

  • A: Yes, we offer AR (Anti-Reflective) coatings designed for specific wavelengths (e.g., 193 nm, 248 nm, 1064 nm) to minimize reflection loss and maximize transmission through the substrate. We also offer specialty high-reflective (HR) coatings.

From Made-in-China to
Global Smart Manufacturing

Yancheng Mingyang Quartz Products Co., Ltd. is a company specializing in the production of quartz and special glass products. Yancheng Mingyang Quartz Products Co., Ltd. is the production plant of Jinzhou Mingde Quartz Glass Co., Ltd. in Jiangsu, Since its establishment, the company has developed rapidly, introduced advanced technology and production equipment at home and abroad, and continuously improved and improved product quality. Relying on its own advantages, we have developed a variety of products suitable for the market and meet the needs of different customers, and solved many urgent production problems for our customers.

The company's products include quartz glass tubes, double-hole quartz glass tubes, quartz glass rods, quartz sheets, sapphire windows, calcium fluoride glass windows, infrared ultraviolet coatings, high-pressure resistant aluminosilicate glass window panels, quartz glass instruments, high borosilicate glass instruments, quartz crucibles, quartz gold-plated tubes, quartz heaters, quartz infrared heating tubes, far-infrared directional radiation heaters ultraviolet germicidal lamps and other special types of quartz glass products.

Yancheng Mingyang Quartz Products Co., Ltd.
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