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Quartz Plates and Discs

Quartz Plates and Discs

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High-Precision Quartz Plates and Discs

Quartz plates and discs are fundamental optical and structural components, fabricated from high-purity fused silica, used in applications demanding flat, stable, and highly transparent materials. These components are critical where excellent UV transmission, minimal thermal expansion, and resistance to chemical attack are necessary. Unlike standard glass, our fused quartz plates maintain superior optical quality and dimensional stability across vast temperature ranges, making them ideal for high-precision instrumentation. We offer materials ranging from commercial-grade clear quartz (JGS2) for general viewing windows and substrates, to ultra-high-purity synthetic quartz (JGS1) required for deep-UV photolithography masks and high-power laser optics. The manufacturing process involves meticulous grinding, lapping, and polishing to achieve industry-leading surface flatness and parallelism, often specified in wavelengths (λ/4, λ/10). The ability of our quartz plates to act as a stable, ultra-low-distortion window or substrate is what defines their value in high-tech manufacturing. We supply products in various formats, including polished optical windows, thin substrates for deposition, and thick base plates for furnace assemblies. Discs are commonly used as viewing ports in vacuum and pressure systems, where the rotational symmetry aids in uniform sealing and stress management. Plates are utilized as robust, chemically inert base layers in wet process stations and as heat shields. We offer customized edge treatments, including precision chamfers and beveled edges, necessary for preventing chipping and facilitating secure mounting. Every component is rigorously inspected using interferometers to verify flatness and parallelism, ensuring that the optical performance meets the strict requirements of metrology and research-grade systems. The combination of exceptional thermal endurance and high optical quality makes our quartz plates and discs indispensable in environments from deep-sea imaging to outer-space satellites.

Optical, Dimensional, and Mechanical Specifications

Precision quartz plates and discs are specified by extremely tight tolerances on surface quality, dimensional geometry, and optical transmission properties.

Parameter Standard Plate/Disc Optical Grade Precision Tolerance/Remark
Diameter/Width Tolerance ±0.1mm ±0.05mm Critical for mounting within system housing.
Thickness Tolerance ±0.05mm ±0.005mm (Laser Substrates) Minimizes optical path variation.
Surface Flatness 3λ per inch λ/10 (Measured at 632.8nm) Key for precision optics and lithography.
Parallelism <30arc seconds <5arc seconds Minimizes beam deviation in windows.
Surface Quality (Scratch-Dig) 60/40 10月20日 MIL-PRF-13830B standard, essential for laser use.
Purity Grade JGS2 (UV-Vis) JGS1 (Deep UV/Low Stress) Determines UV performance and contamination level.
Thermal Shock Resistance Excellent Unaffected by large, rapid ΔT Due to 5.5×10−7/∘C expansion.
UV Absorption Minimal @ 254nm Minimal @ 190nm Synthetic grade is essential for DUV transparency.

The Surface Flatness specification is perhaps the most defining characteristic for high-precision quartz plates. Achieving λ/10 (one-tenth of a wavelength deviation over the aperture) requires complex, multi-stage lapping and polishing. This is non-negotiable for components used in interferometry, photolithography, and high-quality imaging, where wavefront distortion must be minimized. The Scratch-Dig rating directly impacts the Laser Induced Damage Threshold (LIDT) for plates used in high-power pulsed laser systems, necessitating a 20/10 rating to prevent energy absorption at surface flaws. For semiconductor applications, extremely low thickness variation (±5μm) is vital for uniform heating and process repeatability. We also offer customization with specialized coatings, such as Anti-Reflection (AR) or Highly Reflective (HR) coatings, applied via electron beam deposition to maximize transmission or reflection at specific operational wavelengths. The purity grade (JGS1 vs. JGS2) dictates the deep-UV transparency; synthetic JGS1 is chosen when transmission below 200nm is required. Furthermore, the selection of the correct annealing process is crucial to ensure minimal residual stress (birefringence), which is measured using polariscopes, guaranteeing the component does not introduce optical distortion when in use.

Critical Functions in High-Tech Ecosystems

Quartz plates and discs are critical boundary and support components across a range of high-tech and industrial equipment.

  • Semiconductor Manufacturing:
    • Photomask Blanks: Serving as the substrate for the most critical component in lithography, requiring ultra-low defect and λ/10 flatness.
    • Plasma Etch Windows: Acting as RF-transparent viewports into plasma reactors, resisting aggressive corrosive gases.
    • Wafer Carriers and Support Plates: Used as inert, high-ptemperature supports in furnace equipment and wet benches.
  • Optical and Laser Systems:
    • Beam Splitters, Windows, and Filters: High-precision components in spectroscopic, laser alignment, and metrology equipment.
    • Protective Debris Shields: Shielding expensive primary optics from contamination or physical damage in high-power laser environments.
  • Vacuum and Pressure Systems:
    • Viewports and Flange Windows: Providing optical access into high-vacuum, UHV, or high-pressure chambers while maintaining the seal integrity.
  • Chemical Processing and Laboratory:
    • Substrates for Thin Film Deposition: Used in R&D and production systems due to their high temperature and chemical resistance.
    • Heat Exchanger Plates: Used in specialized heat transfer applications where metal contamination is prohibited.

The stability and optical clarity of the plate/disc format are non-negotiable. Whether it is a large-diameter viewport maintaining a UHV seal or a thin, perfectly flat substrate carrying a critical layer of photoresist, the component must be flawlessly manufactured. We specialize in producing plates with the exact edge geometry (e.g., specific chamfers or grooves) required for sealing with O-rings or metal flanges, ensuring reliable, leak-free installation and minimizing stress-induced birefringence at the mounting points.

Performance Benefits and Quality Assurance

Our commitment to excellence in fabrication delivers quartz plates and discs with definitive competitive advantages in performance and lifespan.

  • Extreme Flatness and Homogeneity: We guarantee surface flatness down to λ/10, ensuring minimal wavefront distortion, which is essential for preserving image quality and beam integrity in precision optics and lithography.
  • High UV to IR Transmission: Our JGS1 synthetic grade offers exceptional transparency down to 170nm, unlocking performance in deep-UV systems that are limited by standard materials.
  • Outstanding Thermal Shock Resistance: The near-zero thermal expansion coefficient ensures that the plates and discs can undergo rapid heating and cooling cycles without warping or cracking, leading to exceptional reliability and extended component life in furnace applications.
  • High Purity for Zero Contamination: Utilizing the highest purity fused silica prevents leaching of metallic contaminants, making them the safest choice for contact with high-purity chemicals and silicon wafers.
  • High Laser Damage Threshold (LIDT): Superior surface polishing (e.g., 20/10 Scratch-Dig) eliminates surface defects that act as absorption sites, dramatically increasing the component's resilience to high-power laser exposure.
  • Precision Edge Fabrication: We offer tight-tolerance edge chamfering, grinding, and hole drilling to ensure perfect integration and sealing within mechanical housings and flange assemblies, minimizing installation stress.
  • Full Traceability and Metrology Reporting: Every optical-grade plate/disc is supplied with detailed metrology reports, including interferometer data on flatness and parallelism, ensuring documented quality compliance for highly regulated industries.

By focusing on dimensional precision and optical integrity, our quartz plates and discs provide a superior foundation for critical functions, reducing system failure rates and maximizing the performance of high-end equipment.

Logistics, Packaging, and Volume Procurement

The fragility and high value of optical-grade quartz plates necessitate meticulous handling and secure international logistics.

  • Payment Methods: We accept standard international payments via T/T (Wire Transfer). For high-value custom optical plates, a 40% advance payment is typically required to cover material and initial fabrication costs, with the balance due before shipment following the successful Pre-Shipment Inspection (PSI). Credit terms may be extended to established OEM partners.
  • Cleanroom Packaging: Optical plates and discs are individually cleaned, inspected under dark field illumination, and packaged in Class 100/1000 cleanroom-compliant, anti-static plastic containers, sealed with a nitrogen purge. These containers are then shock-mounted within reinforced wooden crates to ensure zero-defect delivery. Documentation of cleanroom processing is provided with the CoC.
  • Shipping Protocol: Due to the optical precision, Air Freight (DHL/FedEx Priority) is the preferred method globally, typically shipped under CIP (Carriage and Insurance Paid To) terms. Insurance covers the full replacement value against damage in transit. We manage all export documentation, including end-use declarations where required for restricted technologies.
  • Lead Time: Standard thickness and diameter discs (JGS2) can ship within 5-7 business days. Custom sizes, specialized coatings (AR/HR), or precision λ/10 flatness plates require a manufacturing lead time of 3-5 weeks due to the demanding polishing and QC cycle.
  • Volume and Call-Off Orders: We offer inventory management and blanket order agreements for volume customers (e.g., semiconductor tool manufacturers), guaranteeing material allocation and capacity for scheduled call-off deliveries, thus ensuring a stable and cost-effective supply chain without requiring the customer to hold large inventory buffers.

Essential Frequently Asked Questions

  • Q: Why do quartz plates need such tight flatness (e.g., λ/10)?

    A: In high-precision optical systems (e.g., lasers, telescopes, interferometers) and photolithography, light travels through the plate/disc. If the surface is not perfectly flat, it introduces wavefront distortion or path difference, degrading image resolution or defocusing the laser beam. λ/10 flatness ensures that the optical path variation is minimal, preserving the integrity of the light beam, which is non-negotiable for high-resolution applications.

  • Q: What is the benefit of a disc shape over a square plate for a vacuum viewport?

    A: Discs (circular geometry) are inherently stronger than square plates for handling pressure differentials (vacuum or high pressure). The uniform curve distributes stress evenly across the entire surface and the edge, minimizing stress concentration points (which occur at the corners of square plates). This geometric advantage leads to higher safety factors and greater reliability for sealing high-pressure or high-vacuum systems, which is why circular viewports are standard in flange assemblies.

  • Q: Can I get an anti-reflection (AR) coating on a quartz plate for UV applications?

    A: Yes. We apply specialized single-layer or multi-layer dielectric anti-reflection (AR) coatings, even for the deep UV range (e.g., 193nm or 248nm). These coatings are crucial because they significantly reduce surface reflection losses (typically 4% per surface for uncoated quartz), thereby maximizing the total light transmission and improving the efficiency of the optical system. The coating material must be carefully chosen to match the high thermal and UV resistance of the quartz.

  • Q: How is the thickness of a large quartz plate kept uniform?

    A: Achieving high thickness uniformity across large plates (e.g., 600mm×600mm) requires specialized, large-format lapping and double-sided polishing machines. These machines simultaneously abrade both faces of the plate under controlled pressure and rotation, ensuring a highly parallel and uniform thickness across the entire component. This process is time-consuming but essential for maintaining the optical performance required for photomask substrates and large viewing windows.

From Made-in-China to
Global Smart Manufacturing

Yancheng Mingyang Quartz Products Co., Ltd. is a company specializing in the production of quartz and special glass products. Yancheng Mingyang Quartz Products Co., Ltd. is the production plant of Jinzhou Mingde Quartz Glass Co., Ltd. in Jiangsu, Since its establishment, the company has developed rapidly, introduced advanced technology and production equipment at home and abroad, and continuously improved and improved product quality. Relying on its own advantages, we have developed a variety of products suitable for the market and meet the needs of different customers, and solved many urgent production problems for our customers.

The company's products include quartz glass tubes, double-hole quartz glass tubes, quartz glass rods, quartz sheets, sapphire windows, calcium fluoride glass windows, infrared ultraviolet coatings, high-pressure resistant aluminosilicate glass window panels, quartz glass instruments, high borosilicate glass instruments, quartz crucibles, quartz gold-plated tubes, quartz heaters, quartz infrared heating tubes, far-infrared directional radiation heaters ultraviolet germicidal lamps and other special types of quartz glass products.

Yancheng Mingyang Quartz Products Co., Ltd.
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Quartz Plates and Discs for Optical and Thermal Applications Quartz Flat Plates & Discs Quartz Substrates and Plates Quartz Viewports and Flanges